Method for fabricating ultra-fine 3D microrobots using laser-processed polymer molds

Method for Manufacturing Ultra-Fine 3D Microrobots Using Laser-Processed Polymer Molds

This technology involves creating a polymer mold using 3D laser lithography, then injecting and sintering a non-polymer material containing magnetic metal particles via plating or dipping to form the entire microrobot structure out of magnetic metal.

Existing photocurable polymer-based microrobots suffer from non-uniform magnetization distribution during magnetic material deposition, and mixing in magnetic particles leads to reduced laser transmittance, lower manufacturing precision, and insufficient structural rigidity.

This technology first creates a high-precision mold using 3D laser lithography, then injects and sinters a non-polymer material (containing magnetic substances) into the mold to metallize the entire structure, ensuring uniform magnetization intensity and high rigidity. Applicable to industrial robots and automation systems, it enhances the rigidity of 3D microrobots and improves magnetization intensity for better control within magnetic fields.

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Key Features:

• Preparing a mold containing microstructures using a 3D laser lithography system
• Manufacturing a 3D microrobot by injecting non-polymer material into the mold
• Producing a sintered body by injecting non-polymer material with a magnetic film formed via plating or dipping into the empty spaces of the mold
• A manufacturing method where the magnetic metal is homogeneously distributed once the sintered body is separated from the mold

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This invention was developed with support from the Ministry of Science, ICT and Future Planning for the development of 3D precision microstructures and foundational technology for cell/drug delivery.