This technology features a scanning probe microscope equipped with a sample-supporting table unit, a probe, a laser source, and a position detector. The table unit is configured with a stacked structure consisting of first and second tables that move in the XY directions, and a rotary table driven by a pulley. The through-holes in each table are aligned along the Z-axis, allowing light transmitted through the sample to be captured by a lower photodetector.
While scanning probe microscopes, including atomic force microscopes, are widely used for nanoscale observation, the structural nature of measuring cantilever deflection with a laser makes it difficult to precisely align samples to the optimal position and orientation. There has been a lack of table configurations capable of simultaneously adjusting sample position and rotation while also performing transmitted light measurements.
This technology uses a two-stage XY table to align samples through coarse and fine adjustments, and a rotary table to change the sample orientation, effectively setting the desired observation position and angle. The transmission and guide holes in the center of the tables are aligned, allowing for surface topography measurement while simultaneously obtaining transmitted light signals via the lower photodetector. This technology can be applied to atomic force microscope equipment for nanomaterial analysis, semiconductor surface inspection, and biological sample observation, providing an analysis environment that allows for optical measurements while changing position and orientation without remounting the sample.
N/A
